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氧化/擴(kuò)散/退火爐

適用領(lǐng)域：集成電路、先進(jìn)封裝、化合物半導(dǎo)體 Relevant Industries: Integrated Circuits, Advanced Packaging, Compound Semiconductors 適用材料: ?Si、SiC、GaN Suitable for Processing: Silicon (Si), Silicon Carbide (SiC), Gallium Nitride (GaN) 晶圓尺寸：12/8/6英寸 Wafer Size: 8/6 inch 適用工藝：氧化(Oxidation)、退火(Annealing)、固化(Polyimide)、 合金(Alloy)、擴(kuò)散(Diffusion) Applicable Processes: High-Temperature Annealing

LPCVD設(shè)備

適用領(lǐng)域：集成電路、先進(jìn)封裝、化合物半導(dǎo)體 Relevant Industries: Integrated Circuits, Advanced Packaging, Compound Semiconductors 適用材料: ?Si、SiC、GaN Suitable for Processing: Silicon (Si), Silicon Carbide (SiC), Gallium Nitride (GaN) 晶圓尺寸：12/8/6英寸 Wafer Size: 8/6 inch 適用工藝：氮化硅(SiN)、多晶硅(Poly-Si/U-Poly/D-Poly)、 二氧化硅(TEOS)、HTO等 Applicable Processes: Silicon Nitride (SiN) Deposition, Polysilicon(Poly-Si / U-Poly /D-Poly) Deposition, Silicon Dioxide (TEOS) Deposition, HTO, etc.

SiC高溫退火爐

? 適用領(lǐng)域：化合物半導(dǎo)體 Relevant Industries: Compound Semiconductors ?適用材料：SiC Suitable for Processing: Silicon Carbide (SiC) ?晶圓尺寸：8/6英寸 Wafer Size: 8/6 inch ?適用工藝：高溫退火(Annealing) Applicable Processes: High-Temperature Annealing Applicable process: Annealing of SiC and GaN wafers

SiC高溫氧化爐

?適用領(lǐng)域：化合物半導(dǎo)體 Relevant Industries: Compound Semiconductors ?適用材料：SiC Suitable for Processing: Silicon Carbide (SiC) ?晶圓尺寸：8/6英寸 Wafer Size: 8/6 inch ?適用工藝：高溫氧化(Oxidation) Applicable Processes: High-Temperature Oxidation

LPCVD設(shè)備

?適用領(lǐng)域：集成電路、先進(jìn)封裝 Relevant Industries: Integrated Circuits, Advanced Packaging ?適用材料：Si、SiC Suitable for Processing: Silicon (Si), Silicon Carbide (SiC) ?晶圓尺寸：12/8/6英寸 Wafer Size: 12/8/6 inch ?適用工藝：氮化硅(SiN)、多晶硅(Poly-Si/U-Poly/D-Poly)、二氧化硅(TEOS)、HTO等 Applicable Processes: Silicon Nitride (SiN) Deposition, Polysilicon (Poly-Si / U-Poly / D-Poly) Deposition, Silicon Dioxide (TEOS) Deposition, HTO, etc.

氧化/擴(kuò)散/退火爐

? 適用領(lǐng)域： ?集成電路、先進(jìn)封裝 Relevant Industries: Integrated Circuits, Advanced Packaging ? 適用材料: ?Si、SiC Suitable for Processing: Silicon (Si), Silicon Carbide (SiC) ?晶圓尺寸: ?12/8/6英寸 Wafer Size: 12/8/6 inch ?適用工藝: ?氧化(Oxidation)、退火(Annealing)、固化(Polyimide)、合金(Alloy)、擴(kuò)散(Diffusion) Applicable Processes: ?Oxidation, Annealing, Polyimide Curing, Alloy, Diffusion

垂直布里奇曼法（VB）爐（非銥技術(shù)）

適用領(lǐng)域： ?單晶生長(zhǎng) Relevant Industries:Single Crystal Growth 適用材料: ?Ga2O3、GaAs、InP等 Suitable for Processing: Ga2O3 (Gallium Oxide), GaAs (Gallium Arsenide), InP (Indium Phosphide) etc. 晶圓尺寸: ?12/8/6英寸 Wafer Size: 12/8/6 inch

HVPE 法單晶生長(zhǎng)設(shè)備 —臥式

適用領(lǐng)域：?jiǎn)尉L(zhǎng)、外延生長(zhǎng) Relevant Industries: Single Crystal Growth, Epitaxial Growth 適用材料: ?GaN（單晶）、AIN（單晶/外延）、Ga2O3（外延）、GaAs（外延） Suitable for Processing: GaN (single crystal),AlN (single crystal / epitaxial)Ga2O3 (epitaxial), GaAs (epitaxial) 晶圓尺寸: ?12/8/6/4英寸 Wafer Size: 12/8/6/4 inch

HVPE 法單晶生長(zhǎng)設(shè)備 —立式

適用領(lǐng)域：?jiǎn)尉L(zhǎng)、外延生長(zhǎng) Relevant Industries: Single Crystal Growth, Epitaxial Growth 適用材料: ?GaN（單晶）、AIN（單晶/外延）、Ga2O3（外延）、GaAs（外延） Suitable for Processing: GaN (single crystal),AlN (single crystal / epitaxial)Ga2O3 (epitaxial), GaAs (epitaxial) 晶圓尺寸: ?12/8/6/4英寸 Wafer Size: 12/8/6/4 inch

SiC籽晶粘接設(shè)備

適用領(lǐng)域： ?Bonding Relevant Industries: Bonding 適用材料: ?SiC Suitable for Processing: SiC (Silicon Carbide) 晶圓尺寸: ?12/8/6英寸 Wafer Size: 12/8/6 inch

PVT法長(zhǎng)晶爐——電阻爐

適用領(lǐng)域：?jiǎn)尉L(zhǎng) Relevant Industries: ?Single Crystal Growth 適用材料: ?SiC、AIN Suitable for Processing: ?SiC (Silicon Carbide), AlN (Aluminum Nitride) 晶圓尺寸: ?12/8/6/4英寸,8英寸多坩堝 Wafer Size: 12/8/6/4 inch, 8 inch Multi-crucibles Provide6/8 inches process

PVT法長(zhǎng)晶爐——感應(yīng)爐

適用領(lǐng)域：?jiǎn)尉L(zhǎng) Relevant Industries: ?Single Crystal Growth 適用材料: ?Si、AIN Suitable for Processing: ?SiC (Silicon Carbide), AlN (Aluminum Nitride) 晶圓尺寸: ?12/8/6/4英寸,8英寸多坩堝 Wafer Size: 12/8/6/4 inch, 8 inch Multi-crucibles