SiC高溫退火爐
? 適用領域：化合物半導體 Relevant Industries: Compound Semiconductors
?適用材料：SiC Suitable for Processing: Silicon Carbide (SiC)
?晶圓尺寸：8/6英寸 Wafer Size: 8/6 inch
?適用工藝：高溫退火(Annealing) Applicable Processes: High-Temperature Annealing Applicable process: Annealing of SiC and GaN wafers
